Avand Danesh :: EUV Lithography

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Sensors, Instrumentation & Measurement
Signal Processing
Software Design
Software Engineering
Software Engineering Standards
Software Management
Software Testing
Superconductors
Systems Engineering & Management
Antennas & Propagation
Architecture
Audio & Speech Processing & Broadcasting
Circuit Theory & Design
Circuit Theory & Design / VLSI / ULSI
Communication System Security
Communication Technology
Communication Technology - Networks
Component Manufacturing
Components & Devices
Computer Engineering
Computer Vision
Control Systems Technology
Dielectrics & Electric Insulators
Distributed Systems
Electrical Engineering - Displays
Electrical Engineering Special Topics
Electromagnetic Compatibility
Electromagnetic Theory
Electronic Materials
Electronic Packaging

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EUV Lithography

Bakshi

ISBN: 978-0-470-47155-5

Hardcover

700 pages

January 2009

This is an out of stock title.

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

Capstone

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