Semiconductor Micromachining, 2 Volume Set

Electrochemical and Photochemical Properties of Semiconductors
S. Morrison

Chemical and Electrochemical Etching of Semiconductors
J. Kelly and D. Vanmaekelbergh

Photoetching of III-V Semiconductors: Basic Photoelectrochemical Principles
W. Plieth and S. Wetzenstein

Influence of Photoelectrochemical Etching on Electronic Properties of Semiconductor Surfaces
R. Tenne

Surface Conditioning of Silicon by Photoelectrochemical Etching
C. Levy-Clement

Electrochemical Conditioning of Silicon: Surface Analyses and Electronic Implications
H. Lewerenz and H. Jungblut

The Formation of Porous Silicon
D. Riley

Index

Volume 2

Anisotrophy and the Micromachining of Silicon
A. Campbell, et al.

Etch Stops
S. Collins

Photonic Integrated Circuits, Technology and Concepts
R. Matz

Monolithically Integrated Sensors for Mechanical Quantities in Standard CMOS Processing
H. Offereins, et al.

Silicon on Insulators
C. Harendt and G. Roos

Integrated Sensors and Actuators
N. Najaft

Smart Sensors
N. Najaft and J. Moyne

Anodic Oxidation of Silicon as a Low-Temperature Passivation Technique
G. Mende

Micromachined Optoelectronic Structures and Devices
P. Deimel

Wet and Dry Etching: A Comparison in the Context of Solid State Electronics Applications
K. Bachmann

Index